Pressure Transmitter for Plasma Scrubber

Date: 2022-Jul-27

Semiconductors refer to the substances that can conduct current under certain conditions and have the insulating property under certain circumstances as well. They play a very important role in industrial production. In the production process of semiconductor components, almost every process needs to be cleaned, which leads to the industry of plasma semiconductor cleaning. The manufacturers of this system are mainly located in Japan, South Korea, China, Germany, and the United States.

pressure transmitter for plasma scrubber

The "raw material" in plasma cleaning is the industrial gases, and the gas pressure needs to be stable and adjustable. Therefore, a special pressure transmitter should be installed in the relevant gas path of the plasma cleaning system to monitor and feedback related signals.

The plasma creation process involves introducing a gas or a mixture of gases into a sealed and low-pressure vacuum plasma chamber. Then, these gases are energized by RF power generated between an array of electrodes.

Under the excitation of high-frequency electromagnetic fields, the gas molecules lose electrons, resulting in the generation of plasma. It is important to note that the gases used to create the plasma may sometimes be flammable.

Considering the specific requirements of this application environment, Micro Sensor offers a highly stable pressure transmitter that demonstrates high-level EMC compatibility and features an explosion-proof design.

M20 pressure transmitter, through the mechanical design and circuit design upgrade for the application environment, can perfectly match the application scene and provide customers with more accurate and stable pressure measurement.

pressure transmitter

· Measuring range: 0kPa ~ 25kPa to 0MPa ~ 40MPa

· High performance and high-cost performance;

· Suitable for general industry;

· Fully welded, with PE molecular sieve

· Full digital temperature compensation and calibration.

· CE/IECEX/RoHS Certificated

In the future, Micro Sensor will continue to provide professional equipment and customized monitoring solutions to customers in different fields.


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No. 18, Yingda Road,
Baoji, 721006,Shaanxi,P.R.China

German Subsidiary
Micro Sensor GmbH
Girardetstr. 6, D-45131 Essen, Germany

Tel: +86-29-88346384
Whatsapp: 15114817352